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31395140

Micro-bulk Purifier UHP

Micro-bulk Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 200SLPM

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Article31395140
DescriptionMicro-bulk Purifier UHP FSM1/4 SS316L Corrosives Max. Inlet 250PSIG Max. Flow 200SLPM
Packaging specificationCleaned and double-packed
Vessel construction (material)
SS316L with powder coated steel enclosure
Gas(es) purified
BCl3
BF3
Cl2
ClF3
F2
HBr
HCl
HF
NF3
SF4
WF6
Impurities removed
H2O
Particle filtration
0.1 μm
Inlet particle filtration
1 µm
Outlet purity
< 100 PPT
Regenerable
No
Maximum Pressure Drop
< 1 ATM
Max. operating pressure
17,24 Bar
Max. temperature
Max. 400 °C
Maximum Flow
200 SLPM
Average Flow
10 SLPM
Polishing
Electropolishing
Surface finish
< 10 Ra
尺寸
C
Face Seal male 1/4
Ø D76,0 mm
L
254,0 mm
備註
Remarks
Optional: 0.003 µm filtration
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基本資料

Many gas/impurity combinations can be effectively purified with an ambient temperature purifier. In these applications, it can be very cost effective to simply have an ambient temperature purifier upstream of the use point.

Suitable vessel size is based on the anticipated flow rate of the gas being purified, input impurity load, and desired lifetime between regeneration or replacement. In some cases, it is desirable to oversize the vessel to enhance purity or lifetime performance.

Applicaties
  • High production rate weld gas/purge gas
  • Pharmaceutical production
  • Glove box purge gas
  • Additive manufacturing
  • Annealing cover gas
  • Moderate volume high and ultra high purity applications
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