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31395050

Micro-bulk Purifier UHP

Micro-bulk Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 100SLPM

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Article31395050
DescriptionMicro-bulk Purifier UHP FSM1/4 SS316L Fluorocarbons Max. Inlet 250PSIG Max. Flow 100SLPM
Packaging specificationCleaned and double-packed
Vessel construction (material)
SS316L with powder coated steel enclosure
Gas(es) purified
C2F6
C3F8
C4F8
CClF3
CCl2F2
CCl4
CF4
CHClF2
CHF3
CH3F
Impurities removed
CO
CO2
H2
H20
NMHC
O2
Particle filtration
0.1 μm
Inlet particle filtration
1 µm
Outlet purity
< 100 PPT
Regenerable
No
Maximum Pressure Drop
< 1 ATM
Max. operating pressure
17,24 Bar
Max. temperature
Max. 400 °C
Maximum Flow
100 SLPM
Average Flow
7 SLPM
Polishing
Electropolishing
Surface finish
< 10 Ra
尺寸
C
Face Seal male 1/4
Ø D76,0 mm
L
202,0 mm
備註
Remarks
Optional: 0.003 µm filtration
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基本資料

Many gas/impurity combinations can be effectively purified with an ambient temperature purifier. In these applications, it can be very cost effective to simply have an ambient temperature purifier upstream of the use point.

Suitable vessel size is based on the anticipated flow rate of the gas being purified, input impurity load, and desired lifetime between regeneration or replacement. In some cases, it is desirable to oversize the vessel to enhance purity or lifetime performance.

Applicaties
  • High production rate weld gas/purge gas
  • Pharmaceutical production
  • Glove box purge gas
  • Additive manufacturing
  • Annealing cover gas
  • Moderate volume high and ultra high purity applications
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