Line ID: @teesing
31321210
Point-of-Use Filter
Point-of-Use Filter >0.0015μm Face seal male 1/2 SS316L
| Article | 31321210 |
|---|---|
| 敘述 | Point-of-Use Filter >0.0015μm Face seal male 1/2 SS316L < 5µm Ra |
| 材質 | SS316L |
| 燒結過濾介質材質 | Penta Nickel |
| 最大使用壓力 | 172.5 barg |
| 洩漏率 | Up to 10-9 atm cc/sec |
| 最大壓差 | 34.5 bar |
| 最大值工作溫度 | 450° C |
| 類型 | Face seal male/Face seal male |
| Particle shedding | Zero particle contribution above background (<1 particle> |
| Total hydrocarbons | Below detectable limits per ASTM F1398 test method |
| Moisture contribution | <10 ppb after 1 hour at low-flow ambient purge per semi f27 test method |
| Particle removal size | > 0.0015 μm |
| 過濾效率 | > 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method |
| 拋光 | Electro polishing |
| 表面處理 | < 5µm Ra |
| C | Face seal male 1/2 |
|---|---|
| Ø D | 38,1 mm |
| L | 127 mm |
| SW (HEX) | 26,9 |
| 備註 | Custom designs and fittings available |
|---|
商品比較
For high flow gas filtration efficiency, strength, and reliability, GasShield Penta® all-metal gas filters are ideal for ultra high purity gas delivery applications. They are offered in all welded 316L stainless steel housings with Penta® Nickel filter media and are compatible with most high purity semiconductor process gases. These filters provide 9-log filtration of particles down to 0.0015 µm.