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31380018

Surface Mount C-Seal Filter

Surface Mount C-Seal Filter >0.0015μm 10 SLPM Hastelloy® C-22

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Article31380018
敘述Surface Mount C-Seal Filter >0.0015μm 10 SLPM Hastelloy® C-22
材質Hastelloy® C-22
燒結過濾介質材質Hastelloy® C-22
洩漏率Up to 10-9 atm cc/sec
流速10 SLPM
最大值工作溫度450° C
類型C-Seal 1,125"
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
大甲清洗程序> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
尺寸
L
61 mm
L1
28,6 mm
備註
備註Custom designs and fittings available
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基本資料

GasShield® Surface Mount Filters provide industry-leading 0.0015 µm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield® products are compliant with SEMI F86-0304 specifications for dimensions of two port components for 1.125” four fastener surface mount gas distribution systems with the C-seal configuration.

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