red-y-smart-series
Thermal mass flow meter and controller
High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases
Article | red-y-smart-series |
---|---|
Description | High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases |
Manufacturer | Vögtlin instruments |
Air/Full scale freely selectable | Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM) |
Material body | Anodized aluminium, optional stainless steel electropolished |
Material seal | FPM, EPDM, optional FFKM |
Response time | Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms* |
Repeatability | ± 0.2% of full scale (according to SEMI standard E56-0309) |
Operating pressure | 0.2 – 11 bar a (3 – 160 psia) / GSC with valve type 4,5 and 8 max. 8 bar a (120 psia) |
Pressure sensitivity | < 0.2% / bar of reading (typical N2) |
Temperature sensitivity | 0.025% FS measuring range type per 1°C ( |
Warm-up time | < 1 sec. for full accuracy |
Temperature range | 0 to 50°C |
Current consumption Standard | Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA (GSC with valve type 8 max. 410mA) |
Medium | Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air |
Power supply | 24 Vdc (18 – 30 Vdc), 15 Vdc on request |
Test pressure | 16 bara (240 psia) |
Leak rate | < 1 x 10-6 mbar l/s He |
Environmental protection | IP50 |
EMC | EN 61326-1 |
Output signals analog | 0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V |
Output signals digital | RS-485; Modbus RTU (Slave); LabView-VIs available Option: Profibus DP-V0, DP-V1 / Profinet RT / EtherCAT |
Process connection | G¼” (BSPP* female) up to 60 ln/min (64 SLPM) |
Inlet section | None required |
Electrical connection | Sub D plug, 9 pole |
Mounting orientation | Any position (consult manufacturer above 5 bar or vertical mounting) |