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Thermal mass flow meter and controller

High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases

Technical Specifications
DescriptionHigh-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases
ManufacturerVögtlin instruments
Air/Full scale freely selectable
Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Material body
Anodized aluminium, optional stainless steel electropolished
Material seal
FPM, EPDM, optional FFKM
Response time
Meter (GSM): ± 80ms*; Controller (GSC): ± 500ms*
± 0.2% of full scale (according to SEMI standard E56-0309)
Operating pressure
0.2 – 11 bar a (3 – 160 psia) / GSC with valve type 4,5 and 8 max. 8 bar a (120 psia)
Pressure sensitivity
< 0.2% / bar of reading (typical N2)
Temperature sensitivity
0.025% FS measuring range type per 1°C (
Warm-up time
< 1 sec. for full accuracy
Temperature range
0 to 50°C
Current consumption Standard
Meter (GSM): max. 100 mA; Controller (GSC): max. 250 mA
(GSC with valve type 8 max. 410mA)
Air*, O2*, N2, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air
Power supply
24 Vdc (18 – 30 Vdc), 15 Vdc on request
Test pressure
16 bara (240 psia)
Leak rate
< 1 x 10-6 mbar l/s He
Environmental protection
EN 61326-1
Output signals analog
0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V
Output signals digital
RS-485; Modbus RTU (Slave); LabView-VIs available
Option: Profibus DP-V0, DP-V1 / Profinet RT / EtherCAT
Process connection
G¼” (BSPP* female) up to 60 ln/min (64 SLPM)
Inlet section
None required
Electrical connection
Sub D plug, 9 pole
Mounting orientation
Any position (consult manufacturer above 5 bar or vertical mounting)

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