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Mass Flow Meter & Controller for Gases

Rough Environment Mass Flow Meters & Mass Flow Controllers for Gases

Technical Specifications
DescriptionRough Environment Mass Flow Meters & Mass Flow Controllers for Gases
ManufacturerVögtlin instruments
Material housing
Air/Full scale freely selectable
Body size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Material body
Stainless steel 316L
Material seal
EPDM (FDA), optional FKM and FFKM
Response time
Meter (GIM): ± 80ms*; Controller (GIC): ± 500ms*
± 0.2% of full scale (according to SEMI standard E56-0309)
Longterm stability
< 1% of measured value / year
Operating pressure
0,2 – 11 bara (3 – 160 psia) / GIC with valve type 4,5 and 8: max. 8 bara (120 psia)
Pressure sensitivity
<0.2% / bar (<0.014% / psi) of reading (typical N2)
Temperature sensitivity
<0.025% FS measuring range type per 1°C (<0.012% per 1°F)
Warm-up time
< 1 sec. for full accuracy
Temperature range
0 to 50°C
Air, O2*, N2*, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air
Current consumption
Meter (GIM): max. 100 mA; Controller (GIC): max. 250 mA
(GIC with valve type 8 max. 410mA)
Power supply
24 Vdc (18 – 30 Vdc), 15 Vdc on request
Test pressure
16 bara (240 psia)
Leak rate
< 1 x 10-6 mbar l/s He
Environmental protection
IP67 (conforms to NEMA 6)
EN 61326-1
ATEX Certification
II 3G nA IIC T4 Gc (Category 3 / Zone 2)
II 3D Ex tc IIIC T100°C Dc (Category 3 / Zone 22)
Output signals analog
0-20 mA, 4-20 mA, 0-5 V, 1-5 V, 0-10 V, 2-10 V
Output signals digital
RS-485; Modbus RTU (Slave); LabView-VIs available / option: Profibus DP-V0, DP-V1
Process connection
G¼” (BSPP* female) up to 60 ln/min (64 SLPM)
Inlet section
None required
Electrical connection
Cable gland with compression fitting / Option: M12 plug (DIN-standard)
(both connection IP67 protected)
Mounting orientation
All orientations are possible. We recommend horizontal mounting.
Please contact the manufacturer for further information.

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