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Digital Mass Flow Meter & Regulator for Gases

High-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases

Technical Specifications
DescriptionHigh-precision Thermal Mass Flow Meters & Mass Flow Controllers for Gases
ManufacturerVögtlin instruments
Full scale freely selectable
Body Size ¼” from 0 … 25 mln/min to 0 … 60 ln/min (from 0 … 27 SCCM to 0 … 64 SLPM)
Material body
Anodized aluminium, optional stainless steel electropolished
Material seal
FKM, optional EPDM (FDA)
Response time
Max. 300 msec (depending on filter settings)
Flow update by sensor
40 msec (battery mode 500 msec)
Display update
240 msec (battery mode 500 msec)
± 0.5% of full scale
Longterm stability
< 1% of measured value / year
Operating pressure
0,2 – 11 bara
Pressure sensitivity
< 0.2% / bar (<0.014% / psi) of reading (typical N2)
Temperature sensitivity
< 0.025% FS measuring range type per 1°C (<0.012% FS per 1°F)
Warm-up time
< 1 sec. for full accuracy
Temperature range
0 to 50°C
Turndown ratio
Eco: 1 : 50
Special 1 : 100
Air, O2*, N2*, He, Ar, CO2, H2, CH4, C3H8 (other gases and gas mixtures on request) *O2 & N2 are calibrated with air
Accuracy (air & equivalents)
Eco: ± 2.0% of full scale; ranges > 200 ln/min (200 SLPM) ± 3.0% of full scale.
Power supply meter & regulator
Standard AA battery (lifetime in months depending on operation) or
Micro-USB power supply (DIN 62684)
Option: External power +8…30 Vdc (power consumption max. 120mA)
Power supply switch & all-in
External power +8…30 Vdc (power consumption max. 300mA) or
Touch display (128×64 px) with automatic position adjustment (position sensor)
Process connection
G¼” (BSPP* female) up to 60 ln/min (64 SLPM)
Inlet section
None required
Mounting orientation
Any position (consult manufacturer above 5 bar or vertical mounting)
Connection cable
For external power supply and alarm module: 2 m (6.5 ft) with loose ends
Test pressure
16 bara (240 psia)
Leak rate
< 1 x 10-6 mbar l/s He
Environmental protection
IP50 (conforms to NEMA 1)
EN 61326-1

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