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31321210

Point-of-Use Filter

Point-of-Use Filter >0.0015μm Face seal male 1/2 SS316L

Technical Specifications
Article31321210
DescriptionPoint-of-Use Filter >0.0015μm Face seal male 1/2 SS316L < 5µm Ra
Material
SS316L
Material sintered filter media
Penta Nickel
Maximum working pressure
172.5 barg
He leak rate
Up to 10-9 atm cc/sec
Maximum differential pressure
34.5 bar
Max. operating temperature
450° C
Connection type
Face seal male/Face seal male
Particle shedding
Zero particle contribution above background (<1 particle>
Total hydrocarbons
Below detectable limits per ASTM F1398 test method
Moisture contribution
<10 ppb after 1 hour at low-flow ambient purge per semi f27 test method
Particle removal size
> 0.0015 μm
Filter efficiency (log reduction value)
> 9 LRV (99.9999999% reduction in particles). Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method
Polishing
Electro polishing
Surface finish
< 5µm Ra
Dimensions
C
Face seal male 1/2
Ø D38,1 mm
L
127 mm
SW (HEX)
26,9
Remarks
Remarks
Custom designs and fittings available
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General information

For high flow gas filtration efficiency, strength, and reliability, GasShield Penta® all-metal gas filters are ideal for ultra high purity gas delivery applications. They are offered in all welded 316L stainless steel housings with Penta® Nickel filter media and are compatible with most high purity semiconductor process gases. These filters provide 9-log filtration of particles down to 0.0015 µm.

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