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Filtration - Point-of-Use Filters
High purity gas filters provide 9-log filtration of particles down to 0.0015 µm resulting in particle-free gas. For maximum gas filtration efficiency, strength and reliability, GasShield point-of-use gas filters are ideal for ultra high purity gas delivery applications. They are compatible with most high purity electronics grade process gases.
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Material sintered filter media
Connection type
Connection 1
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Hastelloy ®C-22
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Hastelloy® C-22
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Penta Nickel
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SS316L
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SS316L Fiber
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12,7 mm
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6,35 mm
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Face seal male 1/2
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Face seal male 1/4
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Face seal male 3/4