Filters - Entegris
Entigris liquid Microcontamination business has a long history of providing critical and enabling solutions to our customers’fluid contamination and process control requirements. Gas Microcontamination Solutions of Entegris addresses all gas contamination needs in the fab with a full range of chemical filtration and purification products to help improve process stability, reduce defects and improve throughput and yield.
UHP Valves
The UHP valves of Selfa are diaphragm and bellows valves, ranging from small 4mm passage all the way to large 100mm manual or pneumatic actuation, or a combination in V-blocks. Selfa also offers cryogenic valves for liquefied gases. The Selfa regulators have a special design for lowest particle generation.
UHP fittings - Serto
Serto uses a cleanroom in order to comply to the highest standards of cleanliness. Also very specific lubricants can be used, all with low TOC levels and cleanliness in mind. All components are packaged individually in weld-sealed PE bags, clearly marked, pre-assembled for installation, initial lubrication.
It is possible to connect UHP tubing to plastic tubing or hoses, even flexible hoses are connected leak free by using an internal support sleeve.
UHP fittings - Entegris
Entegris fluid handling systems comprise the broadest range of carefully developed and fully characterized fluid handling products from UHP fittings to complete systems.
UHP fittings - Gazel
Gazel fittings are the UHP fittings range of the Rotarex Group. Gazel fittings are cleaned, mounted, and packed in cleanroom conditions according to UHP specifications.Gazel has 5 ranges of fittings: Metal gasket face seal fittings, Space saver fittings, High flow fittings, Micro fittings, Weld fittings.